JPH0262653U - - Google Patents
Info
- Publication number
- JPH0262653U JPH0262653U JP14178788U JP14178788U JPH0262653U JP H0262653 U JPH0262653 U JP H0262653U JP 14178788 U JP14178788 U JP 14178788U JP 14178788 U JP14178788 U JP 14178788U JP H0262653 U JPH0262653 U JP H0262653U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- ion
- divergence
- implantation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims 3
- 238000011144 upstream manufacturing Methods 0.000 claims 3
- 239000007943 implant Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14178788U JPH0262653U (en]) | 1988-10-29 | 1988-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14178788U JPH0262653U (en]) | 1988-10-29 | 1988-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0262653U true JPH0262653U (en]) | 1990-05-10 |
Family
ID=31407167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14178788U Pending JPH0262653U (en]) | 1988-10-29 | 1988-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0262653U (en]) |
-
1988
- 1988-10-29 JP JP14178788U patent/JPH0262653U/ja active Pending